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Ceramic

Ceramic product

Thermal Insulator(Al2O3ZrO2

  • Selectable from porous to dense materials.
  • Maximum size :W1000 × D1000 × H480[mm]
  • We also have ZrObubbles.

Al2O3(Typical)

Al2O3(Typical)

  • Material:HA-KN
  • Tube(constructed by three parts):φ300×φ280×145[mm]

Al2O3(Typical)

ZrO2(Typical)

ZrO2(Typical)

  • Material:SG-#3
  • Tube(constructed by two parts)φ270×φ240×160[mm]

ZrO2(Typical)

Machined Ceramic

Machined Ceramic

  • Manufacturing of cylindrical parts by a lathe.
  • Maximum size(a rough indication):φ100[mm]x70[mm] L
  • Al2O3 Purity:92・96・99・99.5[%]
  • SiOcoat processing is available.
  • Please consult us about screw hole processing and helisert(helical coil wire screw thread insert).

Thermal Insulator(e.g. for CZ growth of oxide)

  • Alumina ceramic:Al2O3 62~99.5%
  • Zirconia ceramic:ZrO2 + HfO2 92~93%
  • Magnesia ceramic:MgO 99%

Ceramics for semiconductor manufacturing

High purity alumina ceramic:Al2O3 92~99.5%

Comparison of our thermal insulator

HZ-N

HZ-N

SG-B

SG-B

SG-#3

SG-#3

F-SG

F-SG


HZ-N
SG-B
SG-#3
F-SG
Density
Low
Low
Middle
High
Thermal conduction
Low
Low-Middle
Middle
High
Thermal expansion
High
Middle
Low
Middle
Thermal-insulation property & Durability
Good thermal-insulation
property

Balanced
Balanced Good
durability

Highest durability