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Crystal growth furnace

CZ single crystal growth equipment with RF heating system.

Characteristics

Temperature	Max:2,000℃
Heating system	RF induction heating
Chamber	Quartz type

Specifications

Driving system

Pulling speed	Precise speed range: 0.1-10mm/hr Rough speed range: 2-300mm/min (Movable distance: 600mm)
Rotation rate	0.3-60rpm
Work-coil speed	Precise speed range: 0.1-10mm/hr Rough speed range: 2-300mm/min (Movable distance: 100mm)
Load cell	20kg(typical)

RF generator

Output	40kW(work-coil only)
Frequency	Fixed from 5 to 9.9kHz
Power supply	3Φ200V±10％ 50/60Hz

Typical outer size

Main chamber	W 1,450 D 1,450 H 3,190
Controller	W 850 D 1,030 H 1,792
RF generator	W 430 D 810 H 800
Matching trans box	W 676 D 1,090 H 675

Skull melt furnace with RF heating system

RF induction heating skull melt furnace.

Characteristics

Equipment to grow oxide-crystals without Iridium or other metal crucibles.
By realizing the rare metal free process, the growth cost can be dramatically deceased.
And it can grow crystals with very high melting temperature under any gas atmospheres because we do not need to care about the crucible.

Annealing furnace

SANKO has full customized annealing furnace lineups at lower price.

e.g.）Furnace with a wide effective area under high temperature is realized by using

MoSi2 heaters placed in entire sidewalls.

Characteristics

We produce the annealing furnace with a workstage elevating system. Compared with a front-door-opening type, a small footprint, a wide homogenized temperature distribution and a low contamination can be realized.
Under air atmosphere, maximum temperature of 1,800℃ can be achieved by using MoSi2 heater elements.
By using workstage elevating and sliding system, safe and easy work-setting is available.
Temperature controller has 19 programs and each program has 19 steps.
System condition can be checked by monitoring of the heater current and voltage.
Color touch LED display panel is installed and it performs user-friendly operation.
Safe operation is available by the interlock system, such as over-heating and an over-current protection.

Specifications

Furnace size

Available to customize the furnace to customer’s requests.

Footprint

Minimum 340x340mm～

A wide variety of furnace can be realized such as a front-door-opening type and a workstage-elevating type.
Optionally, work slide structure can be installed in the work elevation system.

		Large size	Middle size	Small size
Resistive heating system	Heater material	MoSi2	MoSi2	MoSi2
	Installation of heater	Placed heaters in entire sidewalls	Placed heaters in entire sidewalls	Placed heaters in entire sidewalls
	Inner size	W1,030 D1,030 H530	W730 D730 H550	W380 D380 H430
	Homogenized temperature area	W1,000 D1,000 H480	W680 D680 H550	W340 D340 H400
	Power consumption	80kVA	45kVA	35kVA
Temperature controller	Renge of temperature	0.00～1,700.0℃	0.00～1,700.0℃	0.00～1,700.0℃
	Temperature sensor	B-type thermo couples	B-type thermo couples	B-type thermo couples
	Resolution	0.1℃	0.1℃	0.1℃
	Programs and steps	19programs(19 steps each)	19programs(19 steps each)	19programs(19 steps each)
Work elevating system	Maximum load	2,000kg	2,000kg	1,000kg
Work elevating system	Effective area	W:1,000mm　D:1,000mm	W:680mm　L:680mm	W:340mm　L:340mm
Outer size		W　1,700mm D　2,080mm H　2,600mm	W　1,480mm D　1,985mm H　2,310mm	W　1,100mm D　1,590mm H　2,260mm

High-temperature resistive heating furnace operating under vacuum or inert gas atmosphere

This resistive heating furnace has graphite heater units and a sample transferring unit, and it is operated at high temperature under inert gas atmosphere for material synthesis.

High-temperature resistive heating furnace under vacuum or inert gas atmosphere

Characteristics

The furnace is composed of upper and lower chambers and synthesizes materials effectively.
High-efficiency resistive heating can achieve a maximum temperature of 1,800℃.
Color touch LED display panel is installed and it performs user-friendly operation.
TC monitor data can be logged and available to output in a CSV format.
The work can be easily and safely set by this elevating system.
Auto operation is available by using a recipe control of heater temperature, valves and MFCs.

Vertical resistive heating Bridgman furnace

This equipment heats the inside of an alumina tube to a high temperature under an inert or oxidizing gas atmosphere. An internal crucible is moved and crystals are grown by unidirectional solidification.

Vertical resistive heating furnace T11-18VR

Characteristics

“Vertical” resistive heating system can reduce air contaminations and realize a small footprint.
MoSi₂ heater realizes typical temperature of 1,800℃（max: 1,830℃）under inert or oxygen gas atmosphere.
Crucible elevating system has a seamless axis-speed control from precise to coarse.
Crucible can be easily and safely set by this elevating system.
Crucible and thermocouples（TCs）can rotate in a desired speed.
TC monitor data can be logged and available to output in a CSV format.
System condition can be checked by monitoring of the heater current and voltage.
“Shutter” on the furnace keeps the temperature constant.
Color touch LED display panel is installed and it performs user-friendly operation.
Auto power control operation（0-100%）is available by operating recipes.
Optionally, auto valve control and MFC operation is available.

HOT N₂ gas supplier

High temperature and High purity N₂ gas can be supplied. Temperature（max:400℃）can be controlled and it contains a failsafe system.

HOT N₂ heater specification

Heater Specifications	Single phase AC200V 900W	Single phase AC200V 1800W
N₂flow rate	150SLM	300SLM
Normal gas temperature	150°C	200°C

Flow rate	200L/min or less
Output	Single phase AC200V 1kW
Temperature range	400℃ or less
Pressure range	0.5MPa or less
Outer size	φ90mm×395mm(a joint part except)
Connection	IN/OUT 3/8 Swagelok
Material and shape of theheating wire	KANTHAL APM / Wave type heating element
Body material	SUS304
GAS TEMP: thermo couple for the control system	One pair of K type thermo couple (including 3m compensating lead wires)
HEATER TEMP: thermo couple for the over-heating safe system	One pair of K type thermo couple (including 3m compensating lead wires) Please set the temperature below 600℃.

TAPE HEATER CONTROLLER specification

Temperature Controller	Normal	Expansion
Number of channels	1ch	4ch (max. 20ch by request)
Interlock	Over-temperature, low flow, etc.	Over-temperature, low flow, etc.
Temperature setting	Digital or analog	Digital or analog

number of channels	1ch
Outer size	W:350mm×H:140mm×D:242mm
Temperature range	0〜50℃(no condensing)
Temperature indicator	Two indicators for GAS TEMP and HEATER TEMP
Control type	SSR control
Load	Single phase AC200V 10A
Input power source	Single phase AC200V±10%
Thermo couple	K type thermo couple
External input	Low flow signals, external input signals
Input and output connectors	One set (including 3m cable)
Power supply connection	M5 terminal box
External output connection	M4 terminal box. A contact. (including 3mcable)
Color	Mansel N3
Breaker	15A

Item	Connection place	Remarks
Power supply input terminal	TB1-1,2,3	Single phase AC200V 1KVA with a ground connection
Heater output terminal	TB2-1,2	10A MAX
GAS TEMP thermo couple	TB3-1,2	K type thermo couple
HEATER TEMP thermo couple	TB3-3,4	K type thermo couple
FL low flow signal	TB4-1,2	“Open” at low flow (the temperature is preset to 50℃)
External input signal	TB4-3,4	“Open” at abnormal and emergency (Output is automatically stopped)
Input and output connectors	J1-1,2	Alarmed at “Open”.
	J1-3,4	Output is stopped at “Open”.
	J1-5,6	When GAS TEMP temperature reached to lower or upper limit, the contact becomes “Open”.
	J1-7,8	When GAS TEMP temperature reached to upper limit, the contact becomes “Open” and output is automatically stopped.
	J1-9,10	When HEATER TEMP temperature reached to lower or upper limit, the contact becomes “Open”.
	J1-10,11	When HEATER TEMP temperature reached to upper limit, the contact become “Open” and output is automatically stopped.
	J1-12,13	When HEATER TEMP temperature reached to upper limit, the contact become “Open” and output is automatically stopped.

Safety specification

Over-current detection 2	The circuit protector 15A is installed in a temp. cont. heater line.
Upper and lower limit alarm (GAS TEMP)	Preset value 240 Alarmed when the temperature is out of 100℃±50℃.
Upper and lower limit alarm (HEATER TEMP)	Preset value 500 Alarmed when the temperature is out of 250℃±50℃.
Temperature overheat alarm (GAS TEMP)	Preset value 260 Alarmed when the temperature becomes over 120℃.
Temperature overheat alarm (HEATER TEMP)	Preset value 580 Alarmed when the temperature becomes over 250℃.
Low N₂ flow detection	The temperature of the control unit changes into “50℃”.

Tape Heater

Easy desorption

This tape heater can be set easily and realizes uniform temperature.

Specification

Quality of the material	PTFE
Work	1/4 inch SUS piping
Outside dimension	750mm[ in length]×45mm in width
Electric specification	200ohm±10%(AC100V 50W)
The maximum connectivity number	Five(750mm×5)
Safety	150℃ thermo switch built-in

Control Unit

Jig unit to automate temperature control, flow control, etc.

Characteristics

A touch panel display is used for easy and visual operation.

Data logging and graph display functions make operation simple and easy to use.

Temperature control, gas flow control (mass flow controller, air valve), vacuum pump, exhaust control, transfer motor control, etc. can be managed by recipes for automatic control operation.